PR Stripper

●Model：PRS_SA

●Application : Single Wafer Spin PR strip

●Tool Specification:

■Process Chamber: 1ea

■Chemical Temperature Control(RT~80℃; ±2℃)

■Max . Reclaim Cup: 3ea; Chemical reclaim ratio>90%

■Process arm swing speed control(Swing arm profile)

■A/B tank auto switch

■Auto chemical suck back function(Chemical drop prevention)

■Auto chemical flow rate control

■2-Fluid clean

■N2 Blow drying

■Water mark free 、 Scratch free

■Dry in/ Dry out

■PA Specification: <30ea@0.2um

■Control interface: HMI